Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Oxford Instruments VC 30 Cryostat, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | VC 30 CryostatOxford Instruments | |
|---|---|---|
| OEM | ABM | Oxford Instruments |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | — |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | VC 30[2] |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Manufacturer | — | Oxford Instruments[2] |
| Equipment type | — | Cryostat pump[2] |
| Part / catalog number | — | CRYOS/147[3] |
| Form factor | — | Benchtop / desktop metal enclosure[3] |
| Front panel gauge | — | Dual-scale circular pressure gauge (bar and in Hg scales)[3] |
| Front panel flow indicator | — | Vertical slot-style flow indicator (rotameter-type)[3] |
| Front panel selector | — | Rotary selector knob — switches between STAT (cryostat) and PUMP positions[3] |
| Rear panel connections | — | 4 brass barbed/compression fittings — labeled Recovery, To Pump, From Pump, and Cryostat outlet[3] |
| Enclosure | — | Beige/cream front and top panels, black side panels, wire support stand feet[3] |
| Top | — | Ventilation slots[3] |