Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Tektronix TM 504 Chassis, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | TM 504 ChassisTektronix | |
|---|---|---|
| OEM | ABM | Tektronix |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 1975– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Tektronix TM 504 Chassis |
| Cited variants | — |
|
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[2] | — |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Configuration | — | With AM 502 Modules (3)[3] |
| Type | — | four-bay mainframe[1] |
| System | — | TM500 system[1] |
| Plug-in supplies | — | +33.5 V and −33.5 V, 1.4 A max shared by all compartments[1] |
| Low-power compartments | — | 2 × 25 V AC, 0.5 A / 25 VA; floating ≤350 V (peak) per compartment; +11.5 V and 17.5 V AC with grounded center tap; 3.6 A max shared between all three low power compartments[1] |
| High-power compartment | — | 2 × 25 V AC, 1 A / 50 VA; floating ≤350 V (peak); +11.5 V and 17.5 V AC with grounded center tap; 4 A max shared between these two supplies[1] |
| Power | — | 100/110/120/200/220/240 V, 48 Hz to 440 Hz, max. 220 W[1] |
| Weight | — | 18.5 lbs (8.4 Kg)[1] |
| Size | — | 9.5 in H, 12 in W, 20 in L (24.1 cm H, 30.5 cm W, 50.8 cm L)[1] |