Comparison ledger
Accretech UF 3000 EX Automatic Wafer, Tokyo Electron P 12 XL, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | UF 3000 EX Automatic WaferAccretech | P 12 XLTokyo Electron |
|---|---|---|
| OEM | Accretech | Tokyo Electron |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Accretech UF 3000 | Tokyo Electron P 12 |
| Specifications | ||
| OS Ver | S6.39.BH[2] | — |
| Input | AC 210V Single pulse[2] | — |
| Configuration | 12" Nickel Hot Chucktop[2] | Tri-Temp[5] |
| Head Plate Center Hole Size | 528mm[2] | — |
| Type | Automatic wafer prober[3] | — |
| Hot temp controller | Room~150C[2] | — |
| OS version | S6.39.BH[2] | — |
| Chucktop | 12" Nickel Hot Chucktop[2] | — |
| Z stage | Standard Z Force Stage[2] | — |
| Loader | Open Foub Single Loader[2] | — |
| OCR | Type 6 OCR (Rear-Face Only)[2] | — |
| Probe card tray | Auto Probe Card Tray (O)[2] | — |
| Cleaning unit block | Cleaning Unit Block (O), Cleaning Ceramic Plate(X)[2] | — |
| Ports | USB Port; Ethernet Port[2] | — |
| Card holder clamp motor option | No[2] | — |
| Auto tilt option | No[2] | — |
| Configured wafer sizes | 8" or 12" wafers[4] | — |
| Chuck type | Nickel[4] | — |
| FOUP port | Single FOUP port for 25 wafers[4] | — |
| Transport | Dual robotic wafer transport arms[4] | — |
| Alignment | Auto needle alignment; advanced wafer alignment unit; alignment camera E1-500[4] | — |
| Stage | Quad-Pod Z stage[4] | — |
| Interface options | GPIB interface option; Ethernet interface option[4] | — |
| Process | — | PPF[5] |
| Phase | — | 1 Phase[6] |
| Voltage | — | 208 V[6] |
| Wafer Size | — | 12 inch[8] |
| Tri-Temp | — | Tri-Temp 2002 (10), 2003 (3), 2004, 2005 Vintage[5] |
| OEM | — | Tokyo Electron[5] |
| Model | — | P 12 XL[5] |
| Equipment type | — | Prober[5] |
| Wafer sizes | — | 12 inch[5] |
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