Waferpedia

Comparison ledger

A300versus0020 18698 Part

AJA A300, Applied Materials 0020 18698 Part, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
A300AJA
0020 18698 PartApplied Materials
OEMAJAApplied Materials
CategoryDepositionDeposition
Wafer sizeup to 6 in diameter—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAJA A300Applied Materials 0020 18698 Part
Cited variants—
Specifications
Source familyA300 Series modular magnetrons[1]—
Use in systemsused in Orion-series sputtering systems[1]—
Target sizes2 in and 3 in[1]—
Substrate sizeup to 6 in diameter[1]—
System environmentHV and UHV[1]—
Temperature rangecooled LN2 to 1000 C[1]—
Magnet array modesnearly-balanced, unbalanced, and magnetic material modes[1]—
OEMAJA[1]—
ModelA300[1]—
CategoryDeposition[1]—
Wafer sizeup to 6 in diameter[1]—
Configuration—Dial Cover, Side Local Match, Hdpcvd, Ul[2]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]inventory listing