Comparison ledger
Applied Materials 0010-03254 E Chuck, KLA OP 2600, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | OP 2600KLA |
|---|---|---|
| OEM | Applied Materials | KLA |
| Category | — | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1994 Vintage |
| Control system | — | — |
| Generation | — | — |
| Family | — | KLA OP 2600 |
| Specifications | ||
| P/N | — | 5A-80-00-0007-10[1] |
| Configuration | — | Refurbished[1] |
| Make | — | KLA / Therma-wave[1] |
| Model | — | OP 2600[1] |
| Tool name | — | Thermawave OP2600[2] |
| Wafer size | — | 8 inch[2] |
| Vintage | — | 1994-12[2] |
| Tool condition | — | Refurbished[2] |
| Description | — | Thin film measurement[3] |
| Cassette loader stations | — | Two[2] |
| Optical source | — | 675 nm thermoelectrically cooled diode laser[2] |
| Spectrometry light source | — | 450 to 840 nm tungsten halogen lamp[2] |
| Measurement modes | — | Beam Profile Reflectometry (BPR), Beam Profile Ellipsometry (BPE), and spectrometry[2] |
| Manufacturer | — | KLA / Therma-wave[1] |
| Wafer compatibility | — | 4 to 8 inches[2] |