Waferpedia

Comparison ledger

0010-13622 RF Match forversusPECVD3

Applied Materials 0010-13622 RF Match for, Oxford Instruments PECVD3, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
PECVD3Oxford Instruments
OEMApplied MaterialsOxford Instruments
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13622 RF Match forOxford Instruments PECVD3
Specifications
ConfigurationHigh Efficiency HE RF Match-Bias[1]—
Model0010-13622[1]PECVD3[2]
Product TypeRF Match for PVD (Physical Vapor Deposition)[1]—
FeatureHigh Efficiency HE RF Match-Bias[1]—
OEM—Oxford Instruments[2]
Equipment listing—Oxford Plasmalab System 100 PECVD System[2]
Process manual reference—PECVD Overview from Oxford Instruments[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]nanolab.berkeley.edunanolab.berkeley.edu
  3. [3]nanolab.berkeley.edunanolab.berkeley.edu