Comparison ledger
Applied Materials 0010-13622 RF Match for, Veeco K 475 MOCVD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13622 RF Match forApplied Materials | K 475 MOCVDVeeco |
|---|---|---|
| OEM | Applied Materials | Veeco |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13622 RF Match for | Veeco K 475 MOCVD |
| Specifications | ||
| Configuration | High Efficiency HE RF Match-Bias[1] | — |
| Model | 0010-13622[1] | — |
| Product Type | RF Match for PVD (Physical Vapor Deposition)[1] | — |
| Feature | High Efficiency HE RF Match-Bias[1] | — |
| Voltage | — | 380 VAC[2] |
| Phase | — | 3 Phase[2] |
| Power | — | Peak 66 kW[2] |
| Number of Axis (XYZ) | — | 1[2] |
| Gases | — | N2, H2[2] |
| Chemicals Required | — | Desinged for PH3 Plus '5-7 Ampules[2] |
| Chemicals/Gases Used on Equipment | — | N2, Ar, H2, PH3, ASH3, TNIN, DMZN, TMA, TMGA[2] |
| Frequency | — | 50/60 Hz[2] |
| Peak Power | — | 66 kW[2] |
| Stage Heating | — | Heated[2] |
| Heat Controller Module | — | Veeco Heat Controller Module[2] |
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