Waferpedia

Comparison ledger

0010-21246 PartversusEPS150TRIAX

Applied Materials 0010-21246 Part, Cascade Microtech EPS150TRIAX, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
EPS150TRIAXCascade Microtech
OEMApplied MaterialsCascade Microtech
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Cascade Microtech EPS150TRIAX
Specifications
OEM—Cascade MicroTech[1]
Model—EPS150TRIAX[1]
Equipment type—Probe Station[1]
Enclosure—Light shield enclosure[1]
Measured quantities—Current, voltage, resistance, capacitance, conductance[1]
Capacitance and conductance measurement range—20 Hz to 1 MHz[1]
Applications—I-V characterization; low current measurements; C-V characterization (at multiple frequencies); resistance and conductance measurements; sheet resistance and resistivity measurements of substrates and deposited films[1]
Microscope—Trinocular 6.7x stereo zoom microscope with 100x magnification[1]
Motion axes—Micropositioner movement in x, y, and z[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]smif.pratt.duke.edusmif.pratt.duke.edu