Comparison ledger
Applied Materials 0010-21246 Part, Rigaku 3640 Wafer Disk Analyzer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-21246 PartApplied Materials | 3640 Wafer Disk AnalyzerRigaku |
|---|---|---|
| OEM | Applied Materials | Rigaku |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 1977– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Rigaku 3640 Wafer Disk Analyzer |
| Specifications | ||
| Model | — | 3640 Wafer / Disk Analyzer[1] |
| Make | — | Rigaku[1] |
| Wafer size | — | 8 inch[1] |
| Sample size | — | 8" max.[2] |
| Sample stage | — | XYθ driving system, spin mechanism (for center measurement)[2] |
| Elements for simultaneous analysis | — | 16 elements max.[2] |
| Goniometer | — | Fixed type goniometer for each element; scanning type goniometer for Ti through U[2] |
| Collimator | — | 2 kinds for automatic exchange; selectable from 5, 10, 15 and 20 mm dia.[2] |
| Automatic vacuum degree controller | — | 13 Pa ± 1 Pa (APC: automatic pressure controller)[2] |
| Temperature stabilizer | — | Available[2] |
| X-ray tube | — | Rh target, 3 kW[2] |
| X-ray generator | — | Maximum output: 3 kVA[2] |
| Heat exchanger | — | Distilled water recirculation system (with ion exchange resin)[2] |
| Vacuum pump | — | Dry pump (QDP-80)[2] |
| Cassette-to-cassette | — | Optional[2] |
| Orientation flat/notch | — | Adjustable[2] |
| Software | — | Multiwindow/multitask FP method for multilayer thin film wafer measuring direction setting program[2] |
| Mapping | — | Optional[2] |
| Personal computer | — | DOS/V compatible[2] |
| Operating system | — | OS/2 Warp[2] |
| Display/peripherals | — | 15" color CRT, ink jet printer[2] |