Waferpedia

Comparison ledger

0020 17485 PartversusCCS pro AR

Applied Materials 0020 17485 Part, Leybold CCS pro AR, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 17485 PartApplied Materials
CCS pro ARLeybold
OEMApplied MaterialsLeybold
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 17485 PartLeybold CCS pro AR
Specifications
ConfigurationStrap, RF Out 2 Balanced Coil Match, Hdp[1]1x HPE6 Egun with 7 pockets[2]
Phase—3 Phase[2]
Voltage—400 V AC[2]
Frequency—50 Hz[2]
Power—20 KVA[2]
Mechanical pump—Leybold D65B[2]
High vacuum pump—Turbomolecular[2]
E-gun—1x HPE6 Egun with 7 pockets[2]
Ion source—1x MkI ion source[2]
Dome tooling—Dome tooling[2]
Polycold—Polycold[2]
Domes—2 domes[2]
Drop rings—2 sets of drop rings[2]
Dome holder for loading—1 dome holder for loading[2]
Spare set of shields—Spare set of shields[2]
Manuals and documentation—Hard copies of manuals and documentation[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing