Waferpedia

Comparison ledger

0021 20868 PartversusABM 205 Atmospheric Wafer Handling Robot

Applied Materials 0021 20868 Part, Brooks ABM 205 Atmospheric Wafer Handling Robot, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0021 20868 PartApplied Materials
OEMApplied MaterialsBrooks
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0021 20868 PartBrooks ABM 205 Atmospheric Wafer Handling Robot
Specifications
ConfigurationBar, Bus, Gnd, Turbo Cb Encl, Gen Rack,[1]Single Arm[2]
Arm configuration—Single arm[2]
Wafer size—6 inch, 12 inch[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing