Waferpedia

Comparison ledger

0021 20868 PartversusHX 150 Chiller

Applied Materials 0021 20868 Part, Neslab HX 150 Chiller, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0021 20868 PartApplied Materials
OEMApplied MaterialsNeslab
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0021 20868 PartNeslab HX 150
Specifications
ConfigurationBar, Bus, Gnd, Turbo Cb Encl, Gen Rack,[1]Cool Flow Refrigerated Recirculator[2]
Voltage—208V - 14 Amps - Single phase 3 wire[2]
Make—Neslab[4]
Model—HX 150[4]
Type—Cool Flow Refrigerated Recirculator[2]
Refrigerant—R-22 (some units), R427A (other units)[2]
Pump type—TU-1[2]
Current—14 Amps[2]
Phase—Single phase[2]
Refrigerant configuration—Set up for R-22 or R427A[3]
Condition (example units)—Tested in working condition[2]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]Equipment inventory listing