Comparison ledger
Applied Materials 0041-39086 ESC Part, Applied Materials Centura 5200 Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0041-39086 ESC PartApplied Materials | Centura 5200 DryApplied Materials |
|---|---|---|
| OEM | Applied Materials | Applied Materials |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Applied Materials Centura 5200 |
| Specifications | ||
| Configuration | — | 50/60 Hz[1] |
| Voltage | — | 208V[1] |
| Process type | — | Dry etching[1] |
| Wafer size | — | 8 inch[1] |
| Wafer size (version) | — | 200 mm[2] |
| Electrical: frequency | — | 50/60 Hz[1] |
| Electrical: voltage | — | 208V[1] |
| Electrical: current | — | 240A[1] |
| Chamber configuration | — | 2 Chamber dps Metal, 2 Chamber asp+[2] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →