Waferpedia

Comparison ledger

Centura TPCC RTPversus1000 Hot Plate

Applied Materials Centura TPCC RTP, CEE 1000 Hot Plate, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Centura TPCC RTPApplied Materials
OEMApplied MaterialsCEE
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials Centura TPCC RTPCEE 1000 Hot Plate
Specifications
OEMApplied Materials[1]—
ModelCentura TPCC[1]—
System typeRapid Thermal Process (RTP) system[1]—
Wafer size8 inch[1]—
Configuration—4"[2]
Type—Hot Plate[2]
Wafer Size—4 inch[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing