Waferpedia

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60 100 200 Steppersversus017-0146-01 Prealigner

ASML 60 100 200 Steppers, Brooks 017-0146-01 Prealigner, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
60 100 200 SteppersASML
017-0146-01 PrealignerBrooks
OEMASMLBrooks
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyASML 60 100 200 SteppersBrooks 017-0146-01 Prealigner
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