Comparison ledger
Axcelis 200 ACU, Lam Research Alliance A 6 TCP 9400 DFM Polysilicon, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | Alliance A 6 TCP 9400 DFM PolysiliconLam Research |
|---|---|---|
| OEM | Axcelis | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Lam Research Alliance A 6 TCP 9400 DFM Polysilicon |
| Specifications | ||
| Configuration | Parts Machine[1] | — |
| Manufacturer | Axcelis[1] | — |
| Model | 200 ACU[1] | — |
| Tool type | Asher[1] | — |
| Wafer size | 200mm[3] | — |
| Serial number | AU6A356AH[3] | — |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | — |
| Wafer configuration | 8 inch[2] | — |
| Wafer Size | — | 8 inch[5] |
| Voltage | — | 208 VAC[6] |
| Frequency | — | 50/60 Hz[6] |
| Full Load Current | — | 43 A[6] |
| Short Circuit Interrupting Capacity | — | 10 kA[6] |
| Main Circuit Breaker Rating | — | 50 A[6] |
| Software Version | — | A4.0-37VM[5] |
| ESC Material | — | Anodized Aluminum[5] |
| Interferometer EP | — | PM4[5] |
| Gas Box | — | Enhanced Universal (12 sticks)[5] |
| Pumps | — | Busch DS 80 Cobra, Busch BA 100 (2)[5] |
| Chillers | — | TCU Edwards 40/80 Plus, RPM Voltage SAG Enhanced[5] |
| Transport Module | — | TCP 9400 FM-P (Tungsten Silicide Etch)[5] |
| Software | — | A4.0-37VM[5] |
| PM4 | — | TCP 9400D FM-P, Wsix Etch[5] |
| ESC | — | Anodized Aluminum[5] |
| TCU | — | Edwards 40/80 Plus[5] |
| RPM | — | Voltage SAG Enhanced[5] |
| Main CB Current Rating | — | 50 A[6] |
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