Comparison ledger
Axcelis 200 ACU, Lam Research Exelan Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | Exelan DryLam Research |
|---|---|---|
| OEM | Axcelis | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Lam Research Exelan Dry |
| Cited variants | — | |
| Specifications | ||
| Configuration | Parts Machine[4] | — |
| Manufacturer | Axcelis[4] | Lam Research[8] |
| Model | 200 ACU[4] | Exelan Dry[8] |
| Tool type | Asher[4] | dry etch chamber[9] |
| Wafer size | 200mm[6] | — |
| Serial number | AU6A356AH[6] | — |
| Computer system | M 200 PC, M 200[7] | — |
| Part number | SC 4572 A[7] | — |
| Volts | 208[7] | — |
| Amps | 30[7] | — |
| Equipment type | Asher[4] | — |
| Wafer configuration | 8 inch[5] | — |
| Wafer Size | — | 300mm[1] |
| Vintage (manufacturing year) | — | 2005[1] |
| Wafer Size (via version) | — | 200mm[3] |
| Vintage | — | 2004-06-01[2] |
| Vintage year | — | 2005[9] |
| Variant designation | — | V2 Exelan[9] |
| Variant wafer size | — | 200mm[9] |
| Variant vintage year | — | 2004[9] |
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