Comparison ledger
Axcelis 200 ACU, SPTS Primaxx Xactix, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | Primaxx XactixSPTS |
|---|---|---|
| OEM | Axcelis | SPTS |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | SPTS Primaxx Xactix |
| Specifications | ||
| Configuration | Parts Machine[1] | 230/115 Volts[5] |
| Manufacturer | Axcelis[1] | — |
| Model | 200 ACU[1] | — |
| Tool type | Asher[1] | Etcher[5] |
| Wafer size | 200mm[3] | 6 inch[5] |
| Serial number | AU6A356AH[3] | — |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | — |
| Wafer configuration | 8 inch[2] | — |
| Frequency | — | 60 Hz[5] |
| Phase | — | 1 Phase[5] |
| Power | — | 60 Hz, 230/115 Volts, 1 Phase[5] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →