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200 PCUversusVAC 407 2 A

Axcelis 200 PCU, Brooks VAC 407 2 A, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
200 PCUAxcelis
VAC 407 2 ABrooks
OEMAxcelisBrooks
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones2000 Vintage—
Control system——
Generation——
FamilyAxcelis NV GSD 200Brooks VAC 407 2 A
Cited variants
  • Fusion 200 PCU[1]
  • Fusion 200 PCU-P[2]
—
Specifications
P/NSC 4840 A[3]—
Frequency50 Hz[3]—
Phase3 Phase[3]—
Voltage400 V[3]—
Wafer Sizes—612 inch[4]
200 PCU entryVAC 407 2 A entryAsk about these tools →Share experience with this comparison →

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Sources (4)Every fact above is drawn from these public sources
  1. [1]exapro.comexapro.com
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]inventory listing
  4. [4]Equipment inventory listing