Comparison ledger
Axcelis 200 PCU Photoresist Stabilizer, Lam Research Gasonics Gamma 2130 Photoresist Stripper, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Gasonics Gamma 2130 Photoresist StripperLam Research | |
|---|---|---|
| OEM | Axcelis | Lam Research |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Lam Research Gasonics |
| Specifications | ||
| Configuration | 14 Amps[1] | System Configuration:[3] |
| Voltage | 380 V[1] | — |
| Frequency | 50 Hz[1] | — |
| Phase | 3 Phase[1] | — |
| Load Port | — | Brooks Fixload TM V6[3] |
| EFEM Robot | — | 02-169208-00[3] |
| Aligner | — | Yaskawa[3] |
| RF Rack | — | Generator ENI GHW-50A-04 5ea[3] |
| Light Curtain | — | Keyence[3] |
| EPD | — | 4ea(#2,#3,#4,#5 Port)[3] |
| RF Matcher | — | CPMX-3000 5ea[3] |
| RF Source | — | 02-352103-00 5ea[3] |
| HDIS Pedestal | — | #2, #3, #,1, #6[3] |
| Fixed Pedestal | — | #4, #5[3] |
| Stage #1 | — | Preheat[3] |
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