Waferpedia

Comparison ledger

RapidCure 320 FC RPCversus0 V 500

Axcelis RapidCure 320 FC RPC, Blue M 0 V 500, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 V 500Blue M
OEMAxcelisBlue M
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis RapidCure 320 FC RPCBlue M 0 V 500

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →