Comparison ledger
Brooks 017-0146-01 Prealigner, Canon FPA 5500 iZa, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | FPA 5500 iZaCanon |
|---|---|---|
| OEM | Brooks | Canon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Canon FPA 5500 iZa |
| Cited variants | — |
|
| Specifications | ||
| Manufacturer | — | Canon[2] |
| Model | — | FPA 5500 iZa[2] |
| Category | — | Lithography[3] |
| Tool type | — | Stepper / Scanner[2] |
| Wafer size | — | 300mm[4] |
| Wafer chuck type | — | Pin chuck[4] |
| Projection lens magnification | — | 1:4[4] |
| NA | — | Variable (0.57~0.45 / 0.01 resolution)[4] |
| Exposure light | — | i Line (365nm)[4] |
| Light source | — | Ultra high-pressure mercury lamp[4] |
| Light source manufacturer/model | — | Ushio Inc. / SUV-4500CIL[4] |
| Reticle storage | — | 14ea (Standard), Nikon type 15ea (Total 29ea)[4] |
| Reticle barcode reader | — | 2D[4] |
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