Waferpedia

Comparison ledger

Waferversus103-754

Brooks Wafer, Cascade Microtech 103-754, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
WaferBrooks
103-754Cascade Microtech
OEMBrooksCascade Microtech
CategoryTest & ProbeTest & Probe
Wafer sizeDBM 2407 V 2 Wafer Handling Robot6-inch diameter microchamber and thermal chuck
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks WaferCascade Microtech 103-754
Specifications
Wafer sizeDBM 2407 V 2 Wafer Handling Robot[1]—
ConfigurationPRE 350 B INT CE S 2 Prealigner[1]—
ModelDBM 2407 V 2[1]—
IncludesPRE 350 B INT CE S 2 Prealigner and EDC 2800 BT CE S 2 CM Robot Controller[1]—
type—x-y-z-θ probe positioner[2]
installed on—HFTL 50-GHz Small-Signal Probe Station[2]
quantity in station—two[2]
station chuck size—6-inch-diameter microchamber and thermal chuck[2]
Quantity per station—Two positioners[2]
Chuck size—6-inch-diameter microchamber and thermal chuck[2]
Temperature range—-50 to 200 °C[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]cnf.cornell.educnf.cornell.edu