Comparison ledger
Canon FPA 2500 i 3 i-Line, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FPA 2500 i 3 i-LineCanon | 1000 FamilyUltratech |
|---|---|---|
| OEM | Canon | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Canon FPA 2500 | Ultratech 1000 Family |
| Specifications | ||
| Reticle Size | 5"[1] | — |
| Wafer Type | Notch[1] | — |
| Auto Feed | Left Hand[1] | — |
| Chuck Type | Ring[1] | — |
| Optional Parts | Canon Reticle Charger[1] | — |
| Track Interface / Type | Yes[1] | — |
| Configuration | Software version; VS 5.26 BW[1] | — |
| Date | 6/19/2023[1] | — |
| IUC Uniformity NA/Sigma mode (54/60) | 517[1] | — |
| IUC Distribution NA/Sigma mode (54/60) | 1.5[1] | — |
| IUC Uniformity NA/Sigma mode (50/70) | N/A[1] | — |
| IUC Distribution NA/Sigma mode (50/70) | N/A[1] | — |
| Reticle Barcode | Canon[2] | — |
| Track interface / Type | Yes / Tel[2] | — |
| Software Version | VS 5.26 BW[2] | — |
| Wafer Size | 8 inch[1] | — |
| Track Interface | Yes / Tel[2] | — |
| Optional Part | Canon Reticle Charger[1] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[4] |
| Optical design | — | Wynne Dyson[4] |
| Magnification | — | 1X[4] |
Plan your fab
Building a Lithography process? Get a complete equipment list.
Open the fab equipment planner →