Comparison ledger
Cascade Microtech EPS150, KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EPS150Cascade Microtech | 1007KLA |
|---|---|---|
| OEM | Cascade Microtech | KLA |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Cascade Microtech EPS150 | KLA 1007 |
| Specifications | ||
| OEM | Cascade MicroTech[1] | — |
| Model | EPS150 Triax[1] | 1007[4] |
| Equipment type | Probe Station[1] | Prober[5] |
| Configuration | Manual probe system with 4 independent probe micro-manipulators[2] | — |
| Configured instruments | Keithley 2450 SMU and Agilent LCR meter[2] | — |
| Light shield enclosure | Present[1] | — |
| Probe system | Manual probe system with 4 independent probe micro-manipulators[1] | — |
| Enclosure | Light shield enclosure[3] | — |
| Applications | I-V characterization; low current measurements; C-V characterization at multiple frequencies; resistance and conductance measurements; sheet resistance and resistivity measurements of substrates and deposited films[3] | — |
| SMU voltage measurement range | 10nV - 200V[1] | — |
| SMU voltage measurement resolution | 10nV on 20mV range, 5mV on 200V range[1] | — |
| SMU current measurement range | 10fA - 1A[1] | — |
| SMU current measurement resolution | 10fA on 10nA range, 1uA on 1A range[1] | — |
| LCR meter frequency range | 20Hz to 1MHz[1] | — |
| LCR meter test frequencies | over 8,600 test frequencies[1] | — |
| LCR meter basic accuracy | 0.05%[1] | — |
| LCR meter resolution | 6 digit resolution[1] | — |
| Manufacturer | — | KLA[4] |
| Description | — | Wafer Prober[4] |
| Wafer size | — | 150 mm[4] |
| Convertible to 8 inch wafer size | — | Yes[4] |
| Vintage | — | 01.06.1995[4] |
| Make | — | KLA[5] |
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