Waferpedia

Comparison ledger

TFO-10versus0332 F 9453 302 Diffusion

Cascade Microtech TFO-10, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
TFO-10Cascade Microtech
OEMCascade MicrotechVarian
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCascade Microtech TFO-10Varian 0332 F 9453 302 Diffusion
Specifications
Capacity10.6 cu.ft. (300 liters)[1]—
Interior Dimensions (W x D x H)29.8 x 20.6 x 30.0 inches (757 x 524 x 762 mm)[1]—
Exterior Dimensions (W x D x H)44.1 x 29.9 x 56.8 inches (1121 x 760 x 1442 mm)[1]—
Unit Weight357 lb (162.8 kg)[1]—
Shipping Weight449 lb (204 kg)[1]—
Shelves3 standard, 8 maximum[1]—
Access Port3 inches[1]—
Warranty2-Year Limited Warranty[1]—
Electrical220V-240V, 50/60Hz, 1 phase, 26 amps[2]—
Temperature Range15°C above ambient to 306°C[1]—
Heat-Up Time to 150°C14 minutes (from ambient 25°C)[2]—
Recovery Time after 30 sec Door Opening at 150°C3 minutes[1]—
Temperature Uniformity at 150°C2.5°C[1]—
Flow Rate51 CFM[1]—
Safety CertificationsTÜV SÜD America: Canada CSA 61010-1, USA UL 61010-1, EU EN 61010-1, CE[1]—
Temperature Uniformity at 80°C1.5°C[2]—
Temperature Uniformity at 306°C5.5°C[2]—
Temperature Stability at 80°C±0.2°C[2]—
Temperature Stability at 150°C±0.3°C[2]—
Temperature Stability at 306°C±0.4°C[2]—
Heat-Up Time to 80°C6 minutes (from ambient 25°C)[2]—
Heat-Up Time to 306°C31 minutes (from ambient 25°C)[2]—
Recovery Time after 30 sec Door Opening at 80°C3 minutes[2]—
Recovery Time after 30 sec Door Opening at 306°C6 minutes[2]—
Recovery Time after 60 sec Door Opening at 150°C6 minutes[2]—
Shelf Capacity per Shelf75 lb (34 kg)[2]—
Shelf Capacity Total225 lb (102 kg)[2]—
Air Flow Across Shelf Space144 linear feet per minute (43.9 meters per minute)[2]—
Air Changes per Hour at 80°C304[2]—
ModelTFO-10[3]—
Typeforced air-drying oven[1]—
Interior dimensions29.8 x 20.6 x 30.0 in (757 x 524 x 762 mm)[1]—
Exterior dimensions44.1 x 29.9 x 56.8 in (1121 x 760 x 1442 mm)[1]—
Access port3 in[1]—
Voltage220V-240V[1]—
Phase1Ø[1]—
Frequency50/60Hz[1]—
Amperage26 A[1]—
Temperature rangeambient +15°C to 306°C[1]—
Heat-up time to 80°C from ambient (25°C)6 minutes[2]—
Heat-up time to 150°C from ambient (25°C)14 minutes[2]—
Heat-up time to 306°C from ambient (25°C)31 minutes[2]—
Asset Number—142841[4]
Last Confirm Date—October 14, 2025[5]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (5)Every fact above is drawn from these public sources
  1. [1]cascadetek.comcascadetek.com
  2. [2]cascadetek.comcascadetek.com
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
  5. [5]fab-spares.comfab-spares.com