Comparison ledger
Disco DFS 8960 Surface Planarization, Strasbaugh 100R16, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 100R16Strasbaugh | |
|---|---|---|
| OEM | Disco | Strasbaugh |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2014 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Disco DFS 8960 Surface Planarization | Strasbaugh 100R16 |
| Specifications | ||
| Configuration | Fully Automatic[1] | — |
| Phase | 3 Phase[1] | — |
| Model | DFS 8960 Surface Planarization[2] | — |
| Manufacturer | Disco[2] | — |
| Category | CMP[1] | — |
| Wafer sizes | 8-inch, 12-inch[2] | — |
| Type | Fully automatic surface planarization system[1] | — |
| Power | 200-230 V[1] | — |
| Frequency | 50/60 Hz[1] | — |
| Vacuum / pumping | Two duct units for exhausting the process chambers[1] | — |
| Included items | Sedimentation Tank (collection container); Disco DTU 1531 Chiller unit[2] | — |
| Vintage | 2014[2] | — |
| type | — | 1 spindle grinder/polisher[3] |
| drive system | — | DC drive system with 2 motors[3] |
| spindle RPM | — | 1-180 RPM[3] |
| eccentric RPM | — | 1-90 RPM[3] |
| controls | — | digital timer; air down switch; spindle and eccentric speed dials; air regulators[3] |
| capacity | — | 16 inches[3] |
| spindle size | — | 1-8 TPI[3] |
| overall dimensions | — | 28 inches x 36 inches x 48 inches[3] |
| weight | — | 500 lbs[3] |
| origin | — | made in the USA[3] |