Comparison ledger
EV Group 101, SUSS MicroTec ACS 200 +, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 101EV Group | ACS 200 +SUSS MicroTec |
|---|---|---|
| OEM | EV Group | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group 101 | SUSS MicroTec ACS 200 |
| Cited variants | — |
|
| Specifications | ||
| OEM | EV Group[2] | SUSS MicroTec[1] |
| Model | 101[2] | ACS 200 +[1] |
| Equipment name | EVG 101 Spray Coater[2] | — |
| NEMO ID | evgspraycoat[2] | — |
| Training required | EVG 101 Training[2] | — |
| Training duration | 1.50 hours[2] | — |
| Processing technique | Resist Spray Coat (manual)[2] | — |
| Cleanliness | "All"[2] | — |
| Location | SNF Paul G Allen L107 Cleanroom[2] | — |
| Wafer diameter (substrate size) | up to 300 mm[3] | — |
| Available modules | Spin coat / OmniSpray® / develop[3] | — |
| Wafer handling options | Bowed / warped / thin wafer handling, edge handling[3] | — |
| Dispense options | Various resist dispense pumps covering viscosities up to 52000 cP; constant pressure dispense systems; EBR / BSR / pre-wet / bowl wash / liquid priming[3] | — |
| Processing technique (at SNF) | Resist Spray Coat (manual)[4] | — |
| Cleanliness group (at SNF) | "All"[2] | — |
| Voltage | — | 400 V[1] |
| Phase | — | 3 Phase[1] |
| Frequency | — | 60 Hz[1] |
| Configuration | — | With Gencobot 7S / 3L Transfer Robot[1] |
| Wafer Sizes | — | 6 inch[1] |
| Vintage | — | 2007[1] |
| Transfer Robot | — | Gencobot 7S / 3L[1] |
| Developer Module | — | nDeveloper Module[1] |
| Solvent Developer Module | — | Yes[1] |
| Coater Module | — | Yes[1] |
| Thermal Module | — | 2 hotplates, 1 chillplate[1] |
| Controller | — | Kontron[1] |
| Media Storage Tanks | — | 4[1] |
| Media Control Box | — | SUSS[1] |
| Recirculating Chillers | — | Julabo F30-CL (2), Julabo FC 600 S (2)[1] |
| Power Requirements | — | 400 V, 3 Phase, 60 Hz[1] |
| Manufacturer | — | SUSS[1] |
| Equipment type | — | Coater / Developer[1] |
| Developer module type | — | Solvent developer module[1] |
| Coater module | — | Coater module[1] |
| Thermal module | — | Thermal module with 2 hotplates (1 ea chillplate)[1] |
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