Waferpedia

Comparison ledger

F20-UVversus05 LHP 151

Filmetrics F20-UV, Melles Griot 05 LHP 151, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
F20-UVFilmetrics
05 LHP 151Melles Griot
OEMFilmetricsMelles Griot
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyFilmetrics F20-UVMelles Griot 05
Specifications
OEMFilmetrics[1]—
ModelF20-UV[1]05 LHP 151[2]
Equipment sectionMetrology > Optical measurement[1]—
Instrument classification (facility listing)Metrology — Optical measurement[1]—
DocumentationManufacturer's user manual available for download via the CMi equipment page[1]—
ManufacturerFilmetrics[1]—
Facility categoryMetrology / Optical measurement[1]—
Configuration—With 05 LPL 340 Power Supply (Does not power on)[2]
Equipment type—Laser[2]
Make—Melles Griot[2]
Power state—Does not power on[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]epfl.chepfl.ch
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com