Comparison ledger
Filmetrics RS50, MPI TS2000-IFE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | RS50Filmetrics | TS2000-IFEMPI |
|---|---|---|
| OEM | Filmetrics | MPI |
| Category | Test & Probe | Test & Probe |
| Wafer size | 200mm | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Filmetrics RS50 | MPI TS2000-IFE |
| Specifications | ||
| Type | 4 Point Probe System Mapping 4 point Probe system[1] | — |
| Sheet resistance range | 1 mohm/sq to 200 Mohm/sq[1] | — |
| Wafer capability | 200 mm wafers capable[1] | — |
| Wafer size | 200 mm[1] | — |
| Base tool | — | MPI TS2000-IFE 200-mm automated probe station[1] |
| Precision | — | micron precision[1] |
| Probe types in standard configuration | — | two RF probes of GSG, GSSG or GSGSG types[1] |
| Included instruments | — | microscope and digital camera[1] |
| Thermal chuck temperature range | — | -60°C to +200 °C[1] |
| Motion/control | — | probes, microscope, and chuck are automatically controlled in x, y, and z directions with optical feedback[1] |
| RF VNA | — | Anritsu 4-Port ME7838G vector network analyzer capable of a single sweep from 70 kHz to 220 GHz[1] |
| DC bias supply | — | up to 12 DC bias can be supplied by an Agilent 4156C probe station precision semiconductor parameter analyzer capable of +/-200 V, 0.5 A, and 100 V/us pulses[1] |
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