Comparison ledger
Headway 1 EC 101 R 485 Photoresist Spinner, SVG 86, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 86SVG | |
|---|---|---|
| OEM | Headway | SVG |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Headway 1 EC 101 R 485 Photoresist Spinner | SVG 86 |
| Specifications | ||
| Vacuum requirement | 23" Hg[1] | — |
| Electrical | 115 V, 3 A, 50/60 Hz, 1 Ø (single phase)[1] | — |
| Electrical power | 115 V, 3 A, 50/60 Hz, 1 Ø (single phase)[1] | — |
| Track 1 | — | Sender - Coat - Receiver[2] |
| Track 2 | — | Sender - Developer - Receiver[2] |
| Type | — | Coater/Developer[2] |
| Wafer size range | — | 2" to 200mm[3] |
| Wafer shape | — | Round and square[3] |
| Robotic wafer handling | — | Yes[3] |
| Control | — | PC-based graphical user programming, touch screen control[3] |
| Recipe management software | — | Nettrack[3] |
| Barcode input | — | Optional[3] |
| Track configuration | — | Track 1: Sender - Coat - Receiver; Track 2: Sender - Developer - Receiver[2] |
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