Comparison ledger
Heller 1088, Tokyo Electron Formula Vertical, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1088Heller | Formula VerticalTokyo Electron |
|---|---|---|
| OEM | Heller | Tokyo Electron |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Heller 1088 | Tokyo Electron Formula Vertical |
| Cited variants | — |
|
| Specifications | ||
| Heating Zones | 8 zones (4 top and 4 below) plus 1 cooling zone[3] | — |
| Heating Method | Forced convection[3] | — |
| Conveyor Width | 18 inches (45 cm)[3] | — |
| Heated Length | 43.5 inches (111 cm)[3] | — |
| Overall Length | 96 inches (244 cm)[3] | — |
| Height | 50 inches (127 cm)[3] | — |
| Net Weight | 900 lbs (409 kg)[3] | — |
| Thermal Profiler | Included[3] | — |
| Oven Top | Counter balance for easy access to conveyor[3] | — |
| Solder Compatibility | Lead-free and leaded soldering[3] | — |
| Manufacturer | — | Tokyo Electron[4] |
| Model | — | Formula[4] |
| Category | — | Thermal / Diffusion[5] |
| Description | — | Vertical Diffusion Furnace[6] |
| Wafer size | — | 300 mm (12 inch)[6] |
| Wafer size (alternate listing) | — | 12 INCH[2] |
| Available process types | — | ALD HIGH K(H TYPE), DCS SiN, DCS/NH3/HF/F2, TEOS/HF/F2, DCS SiN(H TYPE), DCS SiN(M TYPE), H TYPE, Teos(H TYPE)[1] |
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