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1305 BSG 3versusDSS 200 Synergy Brush

Hitachi 1305 BSG 3, Ontrak DSS 200 Synergy Brush, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
1305 BSG 3Hitachi
DSS 200 Synergy BrushOntrak
OEMHitachiOntrak
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi 1305 BSG 3Ontrak DSS 200 Synergy Brush
Specifications
Category—Wet Processing / Clean[1]
Type—Post-CMP wafer cleaner[2]
Cleaning method—Brush scrub[2]
Configured substrate size—100-200mm substrate[2]
Vintage—1998[3]
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Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]entrepix.comentrepix.com
  3. [3]Equipment inventory listing