Comparison ledger
Hitachi 1305 BSG 3, SSEC 3302 Resist Removal and Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | |
|---|---|---|
| OEM | Hitachi | SSEC |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | Wafer processing modules (2) |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | SSEC 3302 Resist Removal and Wafer |
| Specifications | ||
| Wafer size | — | Wafer processing modules (2)[1] |
| Voltage | — | 220V, 3 Ph, 60 Hz, 30A[1] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →