Comparison ledger
Hitachi HL 8000 M E-Beam Lithography, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | HL 8000 M E-Beam LithographyHitachi | 1000 FamilyUltratech |
|---|---|---|
| OEM | Hitachi | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi HL 8000 M E-Beam Lithography | Ultratech 1000 Family |
| Specifications | ||
| Configuration | 6" reticle mask line[1] | — |
| Manufacturer | Hitachi[1] | — |
| Model | HL 8000 M[1] | — |
| Optics & imaging | 6" reticle mask line[2] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[3] |
| Optical design | — | Wynne Dyson[3] |
| Magnification | — | 1X[3] |
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