Comparison ledger
Hitachi S 3700 N, Hitachi S 3700 N VP-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 3700 NHitachi | S 3700 N VP-SEMHitachi |
|---|---|---|
| OEM | Hitachi | Hitachi |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 3700 N | Hitachi S 3700 N |
| Specifications | ||
| Configuration | Large chamber[1] | Detectors:[3] |
| Type | Scanning Electron Microscope (SEM)[1] | — |
| Wafer size | 12 inch[1] | — |
| Observable area | up to 203 mm in diameter[1] | — |
| Maximum sample height for observation and EDS analysis | up to 110 mm tall[1] | — |
| Analytical capabilities | EDS, EBSD and WDS simultaneously available[1] | — |
| Stage | 5-axis computer eucentric motorized stage with -20/+90* tilt[1] | — |
| Operating modes | One-button selectable High Vacuum / Low Vacuum modes[1] | — |
| SEM class | Ultra Large VP-SEM[2] | — |
| EDS | — | Yes EDAX/ Model: Apollo XP[3] |
| Accessories | — | Carbon Coater (VC-100)[3] |
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