Comparison ledger
Hitachi S 9260 CD-SEM, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 9260 CD-SEMHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 9260 | KLA .204 PSL Wafer |
| Specifications | ||
| Configuration | Missing parts:[1] | NIST Traceable[3] |
| Manufacturer | Hitachi[2] | — |
| Model | S 9260[2] | — |
| Tool type | Critical Dimension Scanning Electron Microscope (CD-SEM)[2] | — |
| Asset number | 70790[1] | — |
| Last confirm date | April 20, 2023[1] | — |
| Vintage | 2006[1] | — |
| Missing parts | TMP + controllers, HV controller, robot controller[1] | — |
| Wafer Size | — | 8 inch[3] |
| Traceability | — | NIST[4] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[3] |
| NIST Traceable | — | Yes[3] |
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