Waferpedia

Comparison ledger

WFH 4 C Wafer RobotversusWFH 4 D Wafer Robot

Kensington WFH 4 C Wafer Robot, Kensington WFH 4 D Wafer Robot, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKensingtonKensington
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKensington WFHKensington WFH
Cited variants—
Specifications
Configurationwith aligner[2]with aligner[4]
Wafer size6 inch[2]—
AlignerIncluded[2]—
CategoryLithography[3]—
ManufacturerKensington[2]Kensington[4]
ModelWFH 4 C[2]WFH 4 D[4]
Description—wafer robot with aligner[1]
Wafer Sizes—6 inch[4]
Version—150/200mm[1]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]inventory listing