Waferpedia

Comparison ledger

4072 A Parametricversus1007

Keysight 4072 A Parametric, KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1007KLA
OEMKeysightKLA
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKeysight 4072 A ParametricKLA 1007
Specifications
Wafer size8 inch[1]150 mm[3]
SMU supportup to 2 HPSMU, up to 2 HRSMU, up to 8 total SMUs[2]—
Switching matrixlow-leakage, customizable from 12 to 48 fully-guarded Kelvin outputs[2]—
High-frequency switching matrixintegrated pulse generator control[2]—
Auxiliary inputs / Extended path inputs8 auxiliary inputs, 48 extended path inputs[2]—
HRSMU measurement resolution2 µV, 1 fA[2]—
HPSMU output capability±200 V, ±1 A[2]—
Capacitance frequency range1 kHz to 2 MHz[2]—
Ground unit current±1.6 A[2]—
HV-SPGU output voltage±40 V (80 V p-p) at high impedance[2]—
HV-SPGU pulse rise/fall timeas fast as 20 ns[2]—
HV-SPGU three-level output pulseprovides three-level output pulse capability[2]—
HV-SPGU arbitrary linear waveform generationALWG function[2]—
Manufacturer—KLA[3]
Model—1007[3]
Description—Wafer Prober[3]
Convertible to 8 inch wafer size—Yes[3]
Vintage—01.06.1995[3]
Make—KLA[4]
Equipment type—Prober[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]parametrictestsolutions.comparametrictestsolutions.com
  3. [3]fabsurplus.comfabsurplus.com
  4. [4]Equipment inventory listing