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Comparison ledger

0035235-003 MMD Headversus2139 Brightfield

KLA 0035235-003 MMD Head, KLA 2139 Brightfield, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 0035235-003 MMD HeadKLA 2139
Specifications
ConfigurationTSTD PCB ASSY, MMD MEAS HEAD[1]30 A[2]
Model0035235-003[1]2139[7]
MakeKLA[1]—
Part DescriptionTSTD PCB ASSY, MMD MEAS HEAD[1]—
Compatible SystemKLA AIT-XP[1]—
Voltage—208 VAC[2]
Phase—3 Phase[2]
Full load—30A[3]
Power—60[4]
Wafer inspector software—Rev. V5.4.010[5]
Full Load Current—30 A[2]
Frequency—50/60 Hz[2]
Vintage—1996[2]
Wafer sizes—6 inch, 8 inch[2]
Current (full load)—30 A[2]
Software—WIN NT[6]
OEM—KLA[7]
Type—Brightfield Inspection[7]
Wafer Sizes—6, 8 inch[2]
Electrical—208 VAC, 3 Phase, 30 A, 50/60 Hz[2]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]Equipment inventory listing