Waferpedia

Comparison ledger

0035235-003 MMD HeadversusFLX 2320 Thin Film Stress Measurement

KLA 0035235-003 MMD Head, KLA FLX 2320 Thin Film Stress Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 0035235-003 MMD HeadKLA FLX 2320
Specifications
ConfigurationTSTD PCB ASSY, MMD MEAS HEAD[1]Dual Wavelength[2]
Model0035235-003[1]FLX 2320[2]
MakeKLA[1]—
Part DescriptionTSTD PCB ASSY, MMD MEAS HEAD[1]—
Compatible SystemKLA AIT-XP[1]—
Frequency—60 Hz[2]
Voltage—115 V[2]
Phase—1 Phase[3]
OEM—KLA[2]
Tool type—Thin Film Stress Measurement System[2]
Wavelength mode—Dual Wavelength[2]
Wafer sizes—8 inch[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing