Waferpedia

Comparison ledger

1007versusS-302-4

KLA 1007, Signatone S-302-4, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1007KLA
S-302-4Signatone
OEMKLASignatone
CategoryTest & ProbeTest & Probe
Wafer size—100mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1007Signatone S-302-4
Specifications
ManufacturerKLA[1]—
Model1007[1]—
DescriptionWafer Prober[1]—
Wafer size150 mm[1]—
Convertible to 8 inch wafer sizeYes[1]—
Vintage01.06.1995[1]—
MakeKLA[2]—
Equipment typeProber[2]—
Type—Four Point Resistivity Probe Station[3]
Probe stand—100 mm[3]
Probe head—4 point probe head with 5 mil radius tips of 40 mil spacing[3]
Measurement use—Sheet resistance and resistivity measurements of substrates and thin films[3]
Interfaces with—Keithley 2450[3]
Probe stand size—100 mm[3]
Measurement capabilities—Sheet resistance and resistivity measurements of substrates and thin films[3]
Interfaces—Keithley 2450[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com
  2. [2]Equipment inventory listing
  3. [3]smif.pratt.duke.edusmif.pratt.duke.edu