Waferpedia

Comparison ledger

1007versusPA 300

KLA 1007, SUSS MicroTec PA 300, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1007KLA
PA 300SUSS MicroTec
OEMKLASUSS MicroTec
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1007SUSS MicroTec PA 300
Cited variants—
  • PA 300 Control[1]
  • PA 300 ProbeShield Probing[1]
Specifications
ManufacturerKLA[2]—
Model1007[2]—
DescriptionWafer Prober[2]—
Wafer size150 mm[2]—
Convertible to 8 inch wafer sizeYes[2]—
Vintage01.06.1995[2]—
MakeKLA[3]—
Equipment typeProber[3]—
Configuration—with Cold Option[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]Equipment inventory listing
  4. [4]inventory listing