Comparison ledger
KLA .204 PSL Wafer, KLA OP 1600 Film Thickness Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA OP |
| Specifications | ||
| Configuration | NIST Traceable[1] | Equipe ATM[4] |
| Wafer Size | 8 inch[1] | — |
| Traceability | NIST[2] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[1] | — |
| Software | — | 3.0 K 14[3] |
| Equipment type | — | Film Thickness Measurement System[3] |
| Manufacturer | — | KLA / Therma-wave[3] |
| Model | — | OP 1600[3] |
| Wafer size support | — | 12 inch[3] |
| Software version | — | 3.0 K 14 (3.0K14)[3] |
| Unit equipment configuration | — | Equipe ATM (on some units)[4] |
| Unit vintage | — | 1995[3] |
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