Comparison ledger
KLA .496 PSL Wafer, Micro-Vu Vertex 410 Measuring Center, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Vertex 410 Measuring CenterMicro-Vu | |
|---|---|---|
| OEM | KLA | Micro-Vu |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Micro-Vu Vertex |
| Specifications | ||
| Configuration | NIST Traceable[1] | 100-240 V[3] |
| Wafer size | 8 inch[1] | — |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | Metrology & Inspection[5] |
| Software | — | Circa 2001[3] |
| Power | — | 100-240 V, 50/60 Hz, 2.4 A[3] |
| Stage size | — | 12x12x6[4] |
| Encoder resolution | — | 1.0 µm = 0.000040", 0.5 µm = 0.000020", 0.1 µm = 0.000004"[4] |
| Zoom lens | — | Programmable 12x zoom lens[4] |
| Lighting | — | 42 channel lighting system[4] |
| Bearing design | — | Mono-Rail[4] |
| Probe ready | — | All systems are probe ready[4] |
| Rotary ready | — | All systems are rotary ready[4] |
| Environment | — | 20 C (68 F) +/-2, 30-80% Humidity[4] |
| Manufacturer | — | Micro-Vu[3] |
| Model | — | Vertex 410 Measuring Center[3] |
| XYZ scales | — | 1 micron[5] |
| Optics | — | Programmable 12x zoom lens[5] |
| Probe readiness | — | Probe ready[5] |
| Rotary readiness | — | Rotary ready[5] |
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