Comparison ledger
KLA .498 PSL Wafer, KLA Surfscan AIT 8010 Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | KLA Surfscan |
| Specifications | ||
| Configuration | NIST Traceable[1] | Hz 50-60[2] |
| NIST traceability | Yes[1] | — |
| Software version | — | 3.3.2.813[2] |
| CIM | — | SECS, GEM[2] |
| Volts | — | 200-240[2] |
| Amps | — | 30[2] |
| Phase | — | 1[2] |
| OEM | — | KLA[2] |
| Model | — | Surfscan AIT 8010[2] |
| Category | — | Metrology & Inspection[3] |
| Wafer size | — | 200mm[3] |
| Hz | — | 50-60[2] |
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