Comparison ledger
Kurt Lesker ALD-150LX, Temescal Simba2, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ALD-150LXKurt Lesker | Simba2Temescal |
|---|---|---|
| OEM | Kurt Lesker | Temescal |
| Category | Deposition | Deposition |
| Wafer size | 150mm | 150mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Kurt Lesker ALD-150LX | Temescal Simba2 |
| Specifications | ||
| OEM | Kurt Lesker[1] | — |
| Model | ALD-150LX[1] | — |
| Load-locked | Yes[2] | — |
| In situ ellipsometer | Film Sense FS-1 Multi-Wavelength[2] | — |
| Available film growth by request | Al2O3, HfO2, ZrO2, HfZrO2, TiN, Ga2O3[2] | — |
| Maximum film thickness stated | up to 20 nm[2] | — |
| Substrate specification | No exposed organics such as polymers[2] | — |
| Small samples | Able to be clipped to wafer carrier[2] | — |
| Power supply | — | 15-kW Temescal Simba2[3] |
| System association | — | Listed as an upgrade option for FC-4400[3] |
| Power rating | — | 15 kW[6] |
| Product type | — | Power supply[7] |
| Function | — | E-beam power supply[8] |
| Associated systems | — | FC-4400, UEFC-5700, FC/BCD-2800[9] |
| Manufacturer | — | Temescal[7] |
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