Waferpedia

Comparison ledger

IPEC 472versusAS 2000

Lam Research IPEC 472, SCREEN AS 2000, side by side. Every value shown is drawn from the cited encyclopedia entries.

Documented as functional equivalents— Same function class: CMP, null[1]
Side-by-side comparison of selected equipment models
Attribute
IPEC 472Lam Research
AS 2000SCREEN
OEMLam ResearchSCREEN
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLam Research IPEC 472SCREEN AS 2000
Specifications
ConfigurationSurface Automated[1]Dual brush and top side brush chambers, spin dry[4]
Wafer size6 inch, 8 inch[2]—
CategoryCMP (Chemical Mechanical Polisher / Chemical Mechanical Planarization)[1]—
Make / OEMLam / IPEC[1]—
Model472[1]—
Gas—1:100 DHF, 1:100 NH4OH[4]
OS—Windows NT[4]
Power—0.750KVA transformer[5]
Missing—HLS cards / condition not well[5]
Wafer Size—8 inch[6]
Brush Chambers—Dual brush and top side brush chambers[4]
Spin Dry—Yes[4]
Process Gases—1:100 DHF, 1:100 NH4OH[4]
Operating System—Windows NT[4]
Vintage Year (example unit)—1998[4]
Vintage Year (another unit)—1999[5]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]Equipment inventory listing
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]Equipment inventory listing