Waferpedia

Comparison ledger

12 Benchtop Lapping PolishingversusDSS 200 Post

Lapmaster 12 Benchtop Lapping Polishing, Ontrak DSS 200 Post, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMLapmasterOntrak
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 12 Benchtop Lapping PolishingOntrak DSS 200
Cited variants—
  • Ontrak DSS200 Series 1[1]
  • Ontrak DSS200 Series 2[2]
Specifications
MakeLapmaster[3]—
Model12[3]—
CategoryCMP[4]—
Type/ApplicationSingle sided[5]—
Plate diameter12 in[5]—
No. of conditioning rings3[6]—
ConfigurationRing lapper[6]With Hepa Mini-Environment[8]
BaseRigid, lightweight, cast aluminum base[6]—
Standard RPM60 RPM[6]—
RPM range with variable speed drive0-60[6]—
Drive motor - lapper0.5 HP[6]—
Drive motor - polisher0.75 HP[6]—
Length25 in[6]—
Width18 in[6]—
Height24 in[6]—
Estimated shipping weight240 lbs[6]—
Approximate weight135 lbs / 61 kg[7]—
Approximate dimensions24.5 in × 17.5 in × 23.8 in (622 mm × 445 mm × 607 mm)[7]—
Electrical systemVarious voltages; 50/60 Hz; 1 phase and 3 phase to customer specification[7]—
Motor1/3 hp / 0.25 kW motor with gear reducer[7]—
Abrasive feed systemDesigned for water or oil based lapping slurries[7]—
Automatic cycle timerAutomatic digital cycle timer[7]—
Ring configurationRing lapper[6]—
Ring ID4.25 inches[6]—
Tool type—double-sided PVA scrubber[2]
Wafer size range—100mm to 200mm[1]
Throughput—45-65 wafers per hour[2]
Post-CMP cleaning applications—oxide, polysilicon, nitride, tungsten, aluminum and copper[2]

Plan your fab

Building a CMP process? Get a complete equipment list.

Open the fab equipment planner →
Sources (9)Every fact above is drawn from these public sources
  1. [1]axustech.comaxustech.com
  2. [2]axustech.comaxustech.com
  3. [3]Equipment inventory listing
  4. [4]waferpedia.comwaferpedia.com
  5. [5]lapmaster-wolters.comlapmaster-wolters.com
  6. [6]catalog.lapmaster.comcatalog.lapmaster.com
  7. [7]lapmaster-wolters.comlapmaster-wolters.com
  8. [8]inventory listing
  9. [9]inventory listing