Waferpedia

Comparison ledger

12 Lapperversus7 AF

Lapmaster 12 Lapper, Strasbaugh 7 AF, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
12 LapperLapmaster
7 AFStrasbaugh
OEMLapmasterStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Strasbaugh 7 AF
Specifications
Outside plate diameter12 inches[1]—
Lapping Speed Range0 to 60 rpm[2]—
Wafer Size Compatibility4 inches or smaller[1]—
Input Voltage110 V[1]—
Frequency60 Hz[1]60 Hz[3]
Phase1[1]3 Phase[3]
Number of Rings3[1]—
Number of Weights3[1]—
Includes Slurry SystemYes[1]—
Includes TimerYes[1]—
OEM—Strasbaugh[4]
Model—7 AF[4]
Tool type—CMP (Chemical Mechanical Polisher)[4]
Electrical—3 Phase, 60 Hz[3]
Wafer size—200 mm[5]
Tapeless backgrinding support—Yes[5]
Compatible wafer types—Bumped and non-bumped wafers[5]
Power supply—3 Phase, 60 Hz[3]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]jmind.comjmind.com
  2. [2]etd.ohiolink.eduetd.ohiolink.edu
  3. [3]inventory listing
  4. [4]Equipment inventory listing
  5. [5]web.archive.orgweb.archive.org